Demounter HIT-DMS
Demounter HIT-DMS summary
HIT-DMS is demounter to demount under 100um wafer from support substrate.
And demounting process is as follows,
- Demount thin wafer from suppor substrate, and bring out one by one.
- By sequence control,this machine check demounting point and temperature.
so HIT-DMS achieve automatic demounting.
Demounter HIT-DMS specification
| Model No. | HIT-DMS |
|---|---|
| Support substrate size | under Ø200mm wafer |
| Plate temperature setting | MAX200℃ |
| bject wafer material | GaAS,Sapphire,SiC, etc |
| Mounting/demounting | Vacuum clamp slide |
| Pressure type | Vacuum pump |
| Operation panel | LCD touch panel |
| Operation type | equence control |
| Dimension | W1050xD550xH1800mm |
| Machine weight | 800kg |
| Notes | - |
*Specifications are subject to change without prior notice
*To use this HIT-DMS, you need air supply.
Additional parts for Demounter HIT-DMS
- -