Polishing machine HIT-18POAb-H2
HIT-18POAb-H2 summary
HIT-18POAb-H2 is single side polishing machine with and high pressre correspondence mechanism.
By using airbag pressure mechanism, HIT-18POAb-H2 supply stable pressure and lapping.
This is rust proof mechanism so you can use silica and many chemical powders.
HIT-18POAb-H2 specification
| Model No. | HIT-18POAb-H2 |
|---|---|
| Plate size | Ø450mm |
| Plate rotation speed | 10-60rpm |
| shaft for process | 2shaft Vacuum clamping |
| Press type | Airbag pressure mechanism |
| Maximum Pressure | 10kg-100kg /1shaft |
| Process head rotation speed | 0-100rpm |
| Force drive shaft | shaft force driven |
| Object size | MAXØ170mm |
| Wafer installation type | Vacuum clamping |
| Planetary motion stroke | +/-35mm range 70mm |
| Planetary motion speed | 1-30mm/sec |
| Operation panel | Hardware relay switch and LCD touch panel |
| Control type | Sequence control |
| Dimension | W1200xD900xH2190mm |
| Machine weight | 1800kg |
| Notes | rust proof mechanism |
*Specifications are subject to change without prior notice
Additional parts for HIT-18POAb-H2
- open type guide roller
- Available to rust proof mechanism