Polishing machine HIT-24P-H4
Polishing machine HIT-24P-H4 summary
HIT-24P-H4 is single side polishing machine with 4shaft.
HIT-24P-H4 is for high pressure polishing(125kg/shaft x4shaft=500kg), so this machine has static spindle.
And this have shaft force driven mechanism and airbag pressure mechanism.
Polishing machine HIT-24P-H4 summary
| Model No. | HIT-24P-H4 |
|---|---|
| Plate size | Ø610mm |
| Plate rotation speed | 0-60rpm |
| shaft for process | 4shaft Ø220mm |
| Press type | Airbag pressure mechanism |
| Maximum Pressure | 10kg(negative pressure) -125kg/1shaft |
| Process head rotation speed | 0-100rpm |
| Force drive shaft | shaft force driven |
| Object size | Ø230mm |
| Wafer installation type | Vacuum clamping |
| Planetary motion stroke | - |
| Planetary motion speed | - |
| Operation panel | Hardware switch and LCD touch panel |
| Operation type | Sequence control |
| Dimension | W1450xD1450xH2200mm |
| Machine weight | 1500kg |
| Notes | Process step; 2step |
*Specifications are subject to change without prior notice
Additional parts for HIT-24P-H4
- Planetary motion mechanism
- Add process step